It can replace the new TFT technology used in OLED, LCD and other equipment LTPS

by:Kimeery     2021-05-29

According to foreign media reports, Solar-Tectic, headquartered in the United States, recently obtained a patent for a new thin film transistor (TFT) technology with the assistance of Binghamton University and Blue Wave Semiconductor. This technology will help improve Organic light-emitting diodes (LCD for Samsung), active matrix OLEDs (AMOLEDs), liquid crystal device (LCD) displays and solar cell devices are more efficient and reduce their costs.

Different from the traditional low-temperature polysilicon (LTPS) process used to manufacture TFTs that drive display pixels and require expensive excimer laser annealing, this new process is derived from metal-induced crystallization (MIC) And using the modified liquid phase epitaxial electron beam process, it is possible to deposit a thin metal layer on a metal oxide, such as magnesium oxide buffer substrate, at a temperature as low as 232°C, and then deposit the final vaporized silicon (Si) layer and Crystallized into a thin film about 50 to 100nm thick, without any metal residues throughout the process.

Analysis of Si film by using Raman spectroscopy and X-ray spectroscopy showed that the electron mobility is as high as 188cm2/Vs (while the traditional LTPS has an electron mobility of 100cm2/Vs).

Researchers hope to further increase the crystal size by using ST and BWS-oriented MgO(111) film buffer substrates, thereby further improving electron mobility, and ultimately improving equipment efficiency and effectively reducing costs.

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